Coating
Thin-film deposition (coating) is the process of forming and depositing thin-film coatings on substrate materials. Depositing thin films of various materials on substrates is one of the important means of micro-nano fabrication. Thin films possess many different properties that can be used to change or improve certain aspects of the substrate's performance.
Atomic Layer Deposition (ALD)
Magnetron Sputtering
Low-Pressure Chemical Vapor Deposition (LPCVD)
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Photolithography
Photolithography is a precision processing technique for patterning parts on thin films or substrates. Photolithography technology uses light to transfer geometric patterns from a photomask to a photosensitive chemical photoresist on the substrate.
Electron Beam Lithography (EBL)
Ion Beam Lithography
UV Lithography
Stepper Lithography
Etching
Etching in micro-nano fabrication is the process of removing unnecessary materials attached to the wafer surface using chemical or physical methods.
RIE-Reactive Ion Etching
Inductively/Capacitance Coupled Plasma (ICP/CCP)
BE-Ion Beam Etching
BE-Ion Beam Etching
Laser Cutting
Inspection
SEM
AFM
Laser Confocal Microscope
Ellipsometer
Spectrophotometer
AOI, etc.
OUR PROMISE
We provide comprehensive support across the entire product lifecycle—encompassing design realization, rapid process optimization, and scalable mass production.
CONTACT US
Building D, 102-104, 388 Ruoshui Road, Suzhou Industrial Park, China