Double-Sided Alignment Nanoimprint Lithography

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In nanoimprint lithography, alignment technology is a critical step, with alignment accuracy directly impacting device performance and yield. The New Dimension Technology team possesses high-precision alignment capabilities, enabling nanometer‑level alignment that effectively reduces product defects, boosts manufacturing yield, and lowers production costs.

 

 

Figure: Alignment accuracy within a 6-inch wafer: less than 1 µm

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